Interactive Modelling and Simulation of Micromirror MEMS Devices

Modeling and Simulation of RF MEMS devices

A stable, device specific, multiple energy domain and multi scale simulation tool for Radio Frequency (RF) MicroElectroMechanicalSystems (MEMS) devices is developed. A structured design methodology is adopted for design and optimization of RF MEMS shunt switch and MEMS inductor. The Computer Aided Design (CAD) tool incorporates physical parameters such as surface roughness. An electromechanical...

Modeling and Simulation of MEMS Devices

MEMS scanning micromirror for optical coherence tomography.

This paper describes an endoscopic-inspired imaging system employing a micro-electromechanical system (MEMS) micromirror scanner to achieve beam scanning for optical coherence tomography (OCT) imaging. Miniaturization of a scanning mirror using MEMS technology can allow a fully functional imaging probe to be contained in a package sufficiently small for utilization in a working channel of a sta...

MEMS WDM Routers Using Analog Micromirror Arrays

There have been increasing interests in programmable optical add-drop multiplexers (OADM) and wavelength-selective switches in wavelength-division-multiplexed (WDM) networks. Conventional OADM has one input and one output channels, in addition to an add and a drop channels [l]. It is also called 1x1 OADM. Dynamic OADM with more than one output ports offers greater flexibility and functionality ...

SOI-CMOS-MEMS Electrothermal Micromirror Arrays